Extreme ultraviolet

11 hours ago 3

Sources: added source

← Previous revision		Revision as of 19:30, 5 July 2025
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	==Sources==		==Sources==
	* {{cite journal \|last=Fomenkov \|first=Igor \|last2=Brandt \|first2=David \|last3=Ershov \|first3=Alex \|last4=Schafgans \|first4=Alexander \|last5=Tao \|first5=Yezheng \|last6=Vaschenko \|first6=Georgiy \|last7=Rokitski \|first7=Slava \|last8=Kats \|first8=Michael \|last9=Vargas \|first9=Michael \|last10=Purvis \|first10=Michael \|last11=Rafac \|first11=Rob \|last12=La Fontaine \|first12=Bruno \|last13=De Dea \|first13=Silvia \|last14=LaForge \|first14=Andrew \|last15=Stewart \|first15=Jayson \|last16=Chang \|first16=Steven \|last17=Graham \|first17=Matthew \|last18=Riggs \|first18=Daniel \|last19=Taylor \|first19=Ted \|last20=Abraham \|first20=Mathew \|last21=Brown \|first21=Daniel \|title=Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling \|journal=Advanced Optical Technologies \|volume=6 \|issue=3-4 \|date=2017-06-27 \|issn=2192-8584 \|doi=10.1515/aot-2017-0029 \|doi-access=free \|pages=173–186 \|url=https://www.degruyter.com/downloadpdf/journals/aot/6/3-4/article-p173.pdf \|access-date=2025-07-05}}		* {{cite journal \|last=Fomenkov \|first=Igor \|last2=Brandt \|first2=David \|last3=Ershov \|first3=Alex \|last4=Schafgans \|first4=Alexander \|last5=Tao \|first5=Yezheng \|last6=Vaschenko \|first6=Georgiy \|last7=Rokitski \|first7=Slava \|last8=Kats \|first8=Michael \|last9=Vargas \|first9=Michael \|last10=Purvis \|first10=Michael \|last11=Rafac \|first11=Rob \|last12=La Fontaine \|first12=Bruno \|last13=De Dea \|first13=Silvia \|last14=LaForge \|first14=Andrew \|last15=Stewart \|first15=Jayson \|last16=Chang \|first16=Steven \|last17=Graham \|first17=Matthew \|last18=Riggs \|first18=Daniel \|last19=Taylor \|first19=Ted \|last20=Abraham \|first20=Mathew \|last21=Brown \|first21=Daniel \|title=Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling \|journal=Advanced Optical Technologies \|volume=6 \|issue=3-4 \|date=2017-06-27 \|issn=2192-8584 \|doi=10.1515/aot-2017-0029 \|doi-access=free \|pages=173–186 \|url=https://www.degruyter.com/downloadpdf/journals/aot/6/3-4/article-p173.pdf \|access-date=2025-07-05}}
			* {{cite journal \|last=Ghimire \|first=Shambhu \|last2=DiChiara \|first2=Anthony D. \|last3=Sistrunk \|first3=Emily \|last4=Agostini \|first4=Pierre \|last5=DiMauro \|first5=Louis F. \|last6=Reis \|first6=David A. \|title=Observation of high-order harmonic generation in a bulk crystal \|journal=Nature Physics \|volume=7 \|issue=2 \|date=2011 \|issn=1745-2473 \|doi=10.1038/nphys1847 \|doi-access=free \|pages=138–141 \|url=https://www.nature.com/articles/nphys1847.pdf \|access-date=2025-07-05}}

	==External links==		==External links==